• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    The invention relates to a tubular target with an end block (2) for supplying coolant to the tubular target (1), the end block (2) comprising a carrier shaft (5) rotatably mounted for holding and the rotation of the tubular target (1), a tubing (8) arranged in the carrier shaft, a closure piece (7) for the tubular target (1) on its end facing the terminal block (2) and a supply of cooling agent (11) into the interior space (3) of the tubular target (1) and a discharge of cooling agent (12). The basic aim, which is to provide a tubular target (1) with which the supply of coolant into the tubular target and the discharge of coolant from the tubular target and hence the cooling of the latter can be improved is achieved by a coolant discharge (12) which is formed through at least one opening (13) in the closure piece (7), which opening is arranged near the wall of the tubular target (1) and eccentrically with respect to the axis of rotation (14) ...
    公开号:BE1019039A5
    申请号:E2009/0280
    申请日:2009-05-06
    公开日:2012-02-07
    发明作者:Hans-Juergen Heinrich；Thorsten Sander；Cornell Weidelt
    申请人:Ardenne Anlagentech Gmbh；
    IPC主号:
    专利说明:

    The invention relates to a tubular target with a terminal block for the supply of coolant, the terminal block comprising a rotatably mounted carrier shaft for the maintenance and rotation of the coolant. tubular target, a pipe disposed on the carrier shaft, a closure piece for the tubular target on its end facing the terminal block, a coolant supply into the interior space of the tubular target and an evacuation of the coolant.
    In the vacuum coating technology, so-called rotary cathodes are known in which a tubular target most often surrounds a magnet structure, the tubular target being rotatably mounted and drivable in such a way that the target material is removed evenly. Such a rotatable tubular target is generally fixed in the vacuum chamber of a vacuum coating plant between two end blocks which are constructed in such a way that they respectively allow rotational mounting of the tubular target. They generally consist of the main components: tubular target, two terminal blocks and, if necessary, a magnet structure. The tubular target, which includes a carrier tube with target material applied to the envelope surface or which is made entirely of target material, is rotatably mounted in a target clamping device or other target mounting device. The magnet structure that produces the magnetic field necessary for focusing the plasma is inside the tubular target.
    The tubular target is connected to the front side, for example by means of a target clamping device, on each side to a terminal block. The terminal blocks are made to be multifunctional and have, among other things, a rotating passage for the supply of coolant which is carried out for the arrival of the coolant and the return of the coolant.
    A tubular target in which driving and feeding are carried out via a terminal block is described in German patent specification DE 102 13 049 A1. The tubular target is constituted entirely here of material to be sprayed. The cooling of the target made in the interior space of the tubular target is fed by an axial supply with a cooling agent, usually water with possibly additives, and is distributed in the interior space of the target by a distributor with many holes. The magnet structure is mounted in the distributor which is arranged either in rotation or in a stationary manner. The coolant is evacuated from within the target by a plurality of apertures which are concentrically disposed around the coolant supply into the terminal block. During the usual horizontal operation of the target, desired by the installation, a maximum and uniform cooling of the inner wall of the target is desired. However, this is not done with the cooling circuit described in patent DE 102 13 049 A1, since the coolant does not completely fill the interior space of the target and therefore does not apply everywhere on the tube.
    When initially filling the interior of the target with the coolant, the air therein is only incompletely expelled from the target tube through the evacuation. In the upper section of the tube lying horizontally, there remains an air bubble which depends on the pressure of the coolant and the flow velocity during filling. Since the filling of the tubular target takes place comparatively slowly, the air is hardly driven by mixing and turbulence with the coolant.
    During continuous operation of the rotating target, the air bubble in the cooling agent circuit is also not reduced or eliminated. The resulting uneven cooling can lead to non-homogeneous removal of the target material during the coating operation until complete failure of the entire cathode. In the same way, when venting the tubular target, it can not be completely emptied, since the cooling water can not flow to the central drain.
    In DE 10 2006 017 455 A1 also, in which the coolant feeds and discharges are arranged eccentrically in the terminal block, there is still, after filling the coolant cavity concerned, the air in the cavity that is causing the problems described.
    The object of the invention is therefore to provide a rotatable tubular target with which the supply of coolant into the tubular target and the cooling agent discharge from the tubular target and thus its cooling can be improved.
    The configuration of the terminal block of the tubular target makes it possible to almost completely expel the air in the interior space of the tubular target through the eccentric opening in an end surface of the tubular target, so that there is no air bubble remaining in the tubular target or in the coolant circuit during operation or when filling the tubular target with coolant. Insofar as a magnet structure is arranged in the tubular target, optimum cooling is thus ensured for the magnet structure even if, due to the process, it is in the upper segment of the tubular target arranged horizontally. In the same way, a complete ventilation of the tubular target, for example during its replacement, is also possible.
    The eccentric design of the opening together with the rotation of the tubular target, during operation, during each revolution, the evacuation of the coolant as the opening is below the surface of the cooling agent and the eventual release of air when the opening is in the region of the air bubble forming with the cooling agent outlet or at least when it is at the most creep point high.
    The invention will be explained in more detail below on the basis of an exemplary embodiment. In the related drawings,
    Fig. 1 shows a detail view of a tubular target with the terminal block for cooling agent supply, and
    Fig. 2 shows a sectional representation through the tubular target along section line A-A in FIG. 1.
    The tubular target 1 of a sputtering cathode normally comprises the tube-shaped target which is retained on both sides in a terminal block 2. The coolant supply and the rotational drive of the tubular target as well as the Voltage supply of the cathode is effected via terminal blocks 2. In FIG. 1, only this part of the tubular target 1 is represented with this terminal block 2 through which the supply of coolant takes place. Normally, the voltage supply (not shown) also takes place via the same terminal block 2 and the drive takes place via the second terminal block not shown which also has a rotational mounting. Other functional configurations of the terminal blocks are also possible. For example, tubular targets are known with which the functions described above are performed only by one of the terminal blocks. The tubular target 1 shown in FIG. 1 is used as a magnetron cathode for sputtering and therefore comprises in its interior space 3 a magnet structure 4. The magnet structure is process dependent and not necessary for the coolant circuit of the magnet. tubular target which will be described below.
    The end block 2 of the tubular target 1, which serves for the supply of coolant, comprises a rotatably mounted carrier shaft 5 which is connected on the front side to the tubular target 1 by means of a suitable retaining device, for example by means of a target clamping device 6. The tubular target 1 is rotatably mounted by means of the carrier shaft 5. The tubular target 1 is closed in the direction of the carrier shaft 5 by a piece of shut off 7. The connection between the shutter piece 7 and the tubular target 1 is made in a sealed manner, the shutter piece 7 rotating with the tubular target 1.
    A pipe 8 is disposed in the carrier shaft 5 configured as a hollow shaft. This tubing 8 maintains a tubular coolant dispenser 9 which is disposed in the tubular target 1 and is sealingly connected to the tubing 8 by a connection 10 passing through the closure piece 7. Both the tubing 8 and the fitting 10 are configured in a tubular fashion and form the coolant supply 11 in the coolant distributor 9. The coolant distributor 9 has one or more openings (not shown) so that the agent The coolant entering the coolant dispenser 9 is dispensed along the entire length and throughout the surrounding interior space 3 of the tubular target 1. In the exemplary embodiment shown, the coolant distributor 9 is open at the other end not shown which ends at a short distance from the second terminal block (not shown) and closes the tubular target 1 to this end. The coolant distributor 9 serves at the same time as a support device for a magnet structure 4. This is stationarily located in the lower region of the horizontally disposed tubular target 1.
    The discharge of coolant 12 from the interior space 3 of the tubular target 1 is achieved by an opening 13 in the shutter piece 7. This opening 13 is eccentric with respect to the axis of rotation of the target tubular 1 and disposed near the wall of the tubular target 1. In the embodiment, the minimum distance between the opening 13 and the wall of the tubular target 1 is limited by the target clamping device 6. In In another design of the target support device, further reduction of the distance which further reduces the danger of a remaining cavity not filled with coolant is possible.
    As can be seen in FIG. 2, the aperture 13 has, in the exemplary embodiment, the shape of a slot which describes an arc at an angle of about 90 °. The length of the arc and the width of the slot are dimensioned such that the size of the opening 13 corresponds approximately to the section of the coolant supply 11. In this case, Differences in magnitude ratios that allow unhindered circulation of the coolant are also possible. In the same way, other forms of the opening 13 or the division of the opening 13 into several individual openings are also possible. In the direction of the stationary pipe 8, the rotary shutter piece 7 has an annular slot 15 which is chosen so small that a rotation of the shutter piece 7 is possible, but the coolant can not escape through However, if small amounts of coolant were to exit through the annular slot 15, this would not be detrimental since the annular slot opens into the coolant outlet 12. Alternatively, it is also possible to have, for example in another embodiment of the coolant discharge 12, a rotatable sealing connection between the closure piece 7 and the tubing 8.
    During the operation of the tubular target 1, the shutter 7 and the opening 13 also rotate with the tubular target 1 so that the opening 13 periodically passes to the highest cusp of its circular motion and that thus, air can also escape from this region of the tubular target 1. Coolant can escape into the remaining region of the circular path of the opening 13 to realize the flow agent circuit. cooling. The shape of the arcuate opening in this case contributes to the evacuation of air and coolant during the rotational movement. In addition, the partial swirling of the coolant in the tubular target 1 due to rotation thereof forces the coolant to withdraw completely or almost completely. In this way, the filling of the tubular target 1 with the coolant or its draining can also take place. Thanks to a continuous rotation of the tubular target 1 and thus thanks to the eccentric opening 13 in revolution, the air bubble is expelled successively from the tubular target during filling and the total evacuation of the cooling agent is obtained when emptying.
    List of Part Numbers 1 Tubular Target 2 Terminal Block 3 Interior Space 4 Magnet Structure 5 Bearing Shaft 6 Target Clamping Device 7 Shutter Part 8 Manifold 9 Coolant Dispenser 10 Fitting 11 Agent Supply cooling 12 Evacuation of coolant 13 Opening 14 Rotation axis 15 Annular slot
    权利要求:
    Claims (6)
    [1]
    Tubular target with a terminal block (2) for supplying coolant to the tubular target (1), the terminal block (2) comprising a carrier shaft (5) rotatably mounted for holding and rotating the tubular target (1), a stationary pipe (8) disposed in the carrier shaft (5), a closure piece (7) for the tubular target on its end facing the terminal block (2) and an evacuation of coolant (12), the closure piece (7) being sealingly connected to the tubular target (1) and rotatably mounted on the tubing (8) and the tubing (8) being designed as a supply of coolant (11) in the interior space (3) of the tubular target (1), characterized in that at least one opening (13) which is arranged as close as possible, in terms of construction, of the wall of the tubular target (1) and eccentrically with respect to the axis of rotation (14) of the tubular member (1) is formed in the shutter piece (7) for the discharge of coolant (12).
    [2]
    2. tubular target according to claim 1, characterized in that the opening (13) is arranged only in a segment of the closure piece (7).
    [3]
    Tubular target according to one of the preceding claims, characterized in that the size of the opening (13) or all the openings collectively corresponds approximately to the size of the coolant supply (11). ).
    [4]
    4. tubular target according to any one of the preceding claims, characterized in that the rotational mounting of the closure piece (7) on the tubing (8) is effected by means of an annular slot (15). 1.
    [5]
    Tubular target according to one of the preceding claims, characterized in that the supply of coolant (11) opens into a coolant distributor (9) which is arranged inside the target. tubular (1) for distributing the coolant over the entire length of the tubular target (1).
    [6]
    6. tubular target according to any one of the preceding claims, characterized in that the closure piece (7) closes the tubular target (1) towards the carrier shaft (5).
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    同族专利:
    公开号 | 公开日
    DE102008039211A1|2009-11-12|
    US9058961B2|2015-06-16|
    DE102008039211B4|2011-08-25|
    US20090277787A1|2009-11-12|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    US20030173217A1|2002-03-14|2003-09-18|Sputtering Components, Inc.|High-power ion sputtering magnetron|
    DE10213049A1|2002-03-22|2003-10-02|Dieter Wurczinger|Rotatable tubular cathode|
    WO2005005682A1|2003-07-04|2005-01-20|Bekaert Advanced Coatings|Rotating tubular sputter target assembly|
    DE3070700D1|1980-08-08|1985-07-04|Battelle Development Corp|Cylindrical magnetron sputtering cathode|
    US4443318A|1983-08-17|1984-04-17|Shatterproof Glass Corporation|Cathodic sputtering apparatus|
    US4466877A|1983-10-11|1984-08-21|Shatterproof Glass Corporation|Magnetron cathode sputtering apparatus|
    US4519885A|1983-12-27|1985-05-28|Shatterproof Glass Corp.|Method and apparatus for changing sputtering targets in a magnetron sputtering system|
    US20070089982A1|2005-10-24|2007-04-26|Hendryk Richert|Sputtering target and method/apparatus for cooling the target|
    DE102006017455A1|2006-04-13|2007-10-25|Applied Materials Gmbh & Co. Kg|Tubular cathode for coating materials in a coating process comprises openings provided between a target carrier tube and a target for contacting the target with coolant|WO2010115189A1|2009-04-03|2010-10-07|General Plasma, Inc.|Rotary magnetron|
    DE102010028421B4|2010-04-30|2012-02-23|Von Ardenne Anlagentechnik Gmbh|Ceramic rolling bearing and end block for a rotating magnetron|
    CN104011257A|2011-12-09|2014-08-27|应用材料公司|Rotatable sputter target|
    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    DE102008022690|2008-05-07|
    DE102008022690|2008-05-07|
    DE102008039211A|DE102008039211B4|2008-05-07|2008-08-22|Pipe target with end block for coolant supply|
    DE102008039211|2008-08-22|
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